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SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia a-HfO2 HfO2
Type Single Compound
Formula HfO2
Role layer
3

RuOx nanocrystals

Type Nano Material
Formula
Role layer
4

amorphous aluminium oxide

amorphous aluminum oxide aluminium(III) oxide amorphous alumina aluminium oxide amorphous Al2O3 aluminum oxide alumina a-Al2O3
Type Single Compound
Formula Al2O3
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
series capacitance

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Applications

Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. cC1jJDf
  2. OTfCAtiqbOUiqZeFAGNFMETl
Product

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Thickness: ~ 1 nm

Thickness: ~ 17 nm

Thickness: ~ 4 nm

Medium: none

Support: n-type Si

Method 2

Type: Physical formation
Source:
Starting materials
  1. zhmJRu
  2. 0JFeptViTXWiEJGJ8RNPSPOF
Product

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Thickness: ~ 1 nm

Thickness: ~ 17 nm

Thickness: ~ 3 nm

Thickness: ~ 3.5 nm

Medium: none

Support: n-type Si

Method 3

Type: Physical formation
Source:
Starting materials
  1. gWI4e2
  2. w2TWagEPYoAbNY90RxK7hGQo
Product

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Thickness: ~ 1 nm

Thickness: ~ 17 nm

Thickness: ~ 3 nm

Thickness: ~ 3.5 nm

Medium: none

Support: n-type Si

Method 4

Type: Physical formation
Source:
Starting materials
  1. TQ4fvF
  2. JA7CgMikI0Z4pcN6n8GmVWDE
Product

SiO2/HfO2/RuOx nanocrystals/Al2O3 film on n-type Si

Thickness: ~ 1 nm

Thickness: ~ 17 nm

Thickness: ~ 3.5 nm

Thickness: ~ 4 nm

Medium: none

Support: n-type Si

References

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