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SiO2/HfO2/RuOx/Al2O3 film on n-type Si

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia a-HfO2 HfO2
Type Single Compound
Formula HfO2
Role layer
3

ruthenium suboxide

ruthenium oxide
Type Single Compound
Formula RuO(x)
Role layer
4

amorphous aluminium oxide

amorphous aluminum oxide aluminium(III) oxide amorphous alumina aluminium oxide amorphous Al2O3 aluminum oxide alumina a-Al2O3
Type Single Compound
Formula Al2O3
Role layer

Properties

Applications

Characterization

Method Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

References

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