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AlN film

Based on

17 Articles
4 Patents
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium nitride

aluminum nitride
Type Single Compound
Formula AlN
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
hardness

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
Product

AlN film

Thickness: ~ 45 nm

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • silicon
  • ammonia
  1. Mg9Go9Il8weKldAZalOzgGBtRka
  2. 6Q84hPLHpyPGvqvvb9XNMAay
Product

AlN film

RMS roughness: 15.190 nm

Thickness: ~ 70 nm

Medium: none

Support: silicon

Method 3

Type: Physical formation
Source:
Starting materials
  • aluminium nitride
  1. hJeE3E
  2. 0kbXWkrl
  3. LproEw
Product

AlN film

Thickness: 97 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
Product

AlN film

Thickness: ~ 54 nm

Medium/Support: none

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • silicon
  • ammonia
  1. RTjNIdTfXyDuCJCudJOIw0jPHG
  2. P6l1XxcNauFYLsiC96imfsFU
Product

AlN film

RMS roughness: 7.338 nm

Thickness: ~ 70 nm

Medium: none

Support: silicon

References

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