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silicon nitride thin film

Based on

31 Articles
1 Patents
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Source
conductance

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Applications

Area Application Source
analysis methods

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Characterization

Method Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  1. UknRlolceCLeiux8fGBQ
Product

silicon nitride thin film

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  1. lTCFN3PpVJi9tqHGbkUO
Product

silicon nitride thin film

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
Product

silicon nitride thin film

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  1. 2hJg7Aomr2lbz0Uz7Vhq
Product

silicon nitride thin film

Method 5

Type: Physical formation
Source:
Starting materials
  • silicon-rich silicon nitride
  1. fdWlfwyYAyD7b3mxBVod
Product

silicon nitride thin film

References

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