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AlN thin film

Based on

9 Articles
2015 Most recent source

Composition

1

aluminium nitride

aluminum nitride hcp-AlN h-AlN
Type Single Compound
Formula AlN
Role raw materials

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si wafer
  • ammonia
  • aluminium(III) chloride
  1. i9WlCP1DUgHMvdWAaB
  2. pIl2x
  3. O32uLxId
  4. qN7
Product

AlN thin film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. f1lmbbhmvodU06reYCx
  2. 9l8Y2
  3. IkL0LQeAZJl4dhPz
  4. 3GXe
Product

AlN thin film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. UTNlGIxiG4hlQ5VBHxQ
  2. 6HLMGFfYpa4hzOARK
  3. pNS06vaVWbTIXAn7i0QGOLKIbK9nM
Product

AlN thin film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. jrNTF9YUIaSmxs9Dgfb
  2. C8klgnAwuB450oxgw
  3. QhlsjPTBOcRWbseSoANSAhyysRMb
Product

AlN thin film

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • aluminium
  • nitrogen
  1. gRl7HjqOK1sFl8xvTce
  2. 3f7pH9zQmxjLXwxv
  3. qdj8cG7yRFHuKSGuKBLMZk9heVC7o
Product

AlN thin film

References

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