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Zr-Si silicide film

Based on

1 Articles
2013 Most recent source

Composition

1

amorphous silicon

amorphous Si a-Si:H a-Si aSi
Type Single Compound
Formula Si
Role layer
2

zirconium silicide crystallites

ZrSi2 crystallites
Type Nano Material
Formula
Role fillers
3

zirconium

Type Single Compound
Formula Zr
Role fillers
4

amorphous silicon

amorphous Si a-Si:H a-Si aSi
Type Single Compound
Formula Si
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electric current

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Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. x55YCC95jfnPspZHJDhDiGFyEnhr6Ml4nBRQtPUbnpMluqiGFsLoXFpIVfvyghXpilGS
  2. dUtGaK
Product

Zr-Si silicide film

Crystallite size: 62.54 - 113.64 nm

Grain diameter: ~ 80 nm

Roughness: ~ 50 nm

Thickness: 30 nm

Medium: none

Support: SiO2/Si substrate

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. 6qDa6dBA5eybsIp7XTpZTFVbHM4FLnnB3lT32edSo3tYhbqvYU14q7rsvmTqW611TEkJ
  2. Zv2k8X
Product

Zr-Si silicide film

Crystallite size: 67.70 - 133.81 nm

Pillar height: ~ 25 nm

Thickness: 30 nm

Medium: none

Support: SiO2/Si substrate

References

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