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phosphorus-doped microcrystalline silicon thin film

Based on

1 Articles
2013 Most recent source

Composition

1

crystalline silicon

c-Si cSi
Type Single Compound
Formula Si
Role raw materials
2

amorphous silicon

amorphous Si a-Si:H a-Si aSi
Type Single Compound
Formula Si
Role raw materials
3

phosphorus

boron
Type Single Compound
Formula P
Role dopant

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical conductivity

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Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • quartz
  • phosphorus-doped silicon
  1. CzV9L9p0wjyEz1i7i
  2. Bg6m7TpGTIzcv5pdq8Th8uFyw
  3. YLnBkozXlQVffyqfTYZqtZSKx5ItoP
  4. vA9XjcH3hX4If2NgRhrU2sd
  5. Sl1OPo
Product

phosphorus-doped microcrystalline silicon thin film

Thickness: 45 nm

Medium: none

Support: quartz

Method 2

Type: Physical formation
Source:
Starting materials
  • quartz
  • phosphorus-doped silicon
  1. CIq8cmyXydTQSh4W2
  2. fOiRPJtqE3okymlqbXBCAqI0p
  3. ZfIm2rBp6rjm0A9GIT7s5Uz2q4RW87
  4. yhck9wT1XoQksXBaK1E7LtK
  5. u1DTwr
Product

phosphorus-doped microcrystalline silicon thin film

Thickness: 45 nm

Medium: none

Support: quartz

Method 3

Type: Physical formation
Source:
Starting materials
  • boron-doped silicon
  • quartz
  1. u38MpfHZ1k0act6qb
  2. KWMru3mmaKxXRVLV9wnj7Rm53
  3. bzhbV0JjoBu4RAPVvx8J3vwGSRp1sk
  4. 1Ab3fBJLgO7CpqpbLJ330T8
  5. lEhPaX
Product

phosphorus-doped microcrystalline silicon thin film

Thickness: 45 nm

Medium: none

Support: quartz

Method 4

Type: Physical formation
Source:
Starting materials
  • boron-doped silicon
  • quartz
  1. 0i5waGXyESxUrEp5Y
  2. 3huWHumJyZUbBhEFsxQqR5puH
  3. YG6oLuJ0y0mk1QoCn0RuRMeeoZQJm8
  4. 1ss9v5SLgGMBxcvw0nnLhOZ
  5. HQcshX
Product

phosphorus-doped microcrystalline silicon thin film

Thickness: 45 nm

Medium: none

Support: quartz

References

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