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phosphorus-doped microcrystalline silicon thin film

Based on

1 Articles
2013 Most recent source

Composition

1

crystalline silicon

c-Si cSi
Type Single Compound
Formula Si
Role raw materials
2

amorphous silicon

amorphous Si a-Si:H a-Si aSi
Type Single Compound
Formula Si
Role raw materials
3

boron

Type Single Compound
Formula B
Role dopant

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electrical conductivity

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Applications

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • quartz
  • phosphorus-doped silicon
  1. ScP9Deg5NjRqPucL5
  2. 5juprHkrr0LqxUqX4i4jRfZ1k
  3. Ua0hyM3JDkADu9Bq0P1EIo4lsPRzFB
  4. 0ydiK6QPOTVrHYfbfV3Du5N
  5. JaYbIQ
Product

phosphorus-doped microcrystalline silicon thin film

Thickness: 45 nm

Medium: none

Support: quartz

Method 2

Type: Physical formation
Source:
Starting materials
  • boron-doped silicon
  • quartz
  1. qq6cU6aAqp9uezht8
  2. WTJyqDQWTwlTwr06IwBbGFYUx
  3. lZGLQHiCNb9l1eswM8yNqgwvhOCfWt
  4. QXUdiXTURyBkNoFOa71BvIR
  5. UTfQv5
Product

phosphorus-doped microcrystalline silicon thin film

Thickness: 45 nm

Medium: none

Support: quartz

Method 3

Type: Physical formation
Source:
Starting materials
  • quartz
  • phosphorus-doped silicon
  1. fbGZuRoCnrx3YCazR
  2. mD6ieFIs1uwaMGFl1iEde7WmU
  3. p93VdH26L5ZVz4T0GXQShGBfgFrSsv
  4. ijMaev7P6RIvuzVf4bKMfsg
  5. UB9GeY
Product

phosphorus-doped microcrystalline silicon thin film

Thickness: 45 nm

Medium: none

Support: quartz

Method 4

Type: Physical formation
Source:
Starting materials
  • boron-doped silicon
  • quartz
  1. dDF89CARwowWwUePt
  2. rKdaVxBgPOnmrwQMm3AyJL9F7
  3. EARViiaSNNBRGuEPZ4MSu6fxeWzcCh
  4. W2JcV6dXR7Kjn5r2EsFsPWk
  5. XhPk2Y
Product

phosphorus-doped microcrystalline silicon thin film

Thickness: 45 nm

Medium: none

Support: quartz

References

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