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Er2TiO5/TaN/SiO2/Si film

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum(III) nitride

tantalum nitride
Type Single Compound
Formula NTa
Role layer
2

erbium titanate

Type Single Compound
Formula Er2TiO5
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2
Product

Er2TiO5/TaN/SiO2/Si film

RMS roughness: 8.51 nm

Thickness: 45 nm

Thickness: 50 nm

Medium: none

Support: Si/SiO2

References

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