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metal oxide semiconductor capacitor material

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium

aluminum
Type Single Compound
Formula Al
Role layer
2

silicon

Type Single Compound
Formula Si
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
4

tantalum nitride

a-TaNx
Type Single Compound
Formula TaN(x)
Role layer
5

copper

Type Single Compound
Formula Cu
Role layer

Properties

General physical and chemical properties

Property Value Source
relative capacitance

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Applications

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
  1. YrdUOy
Product

metal oxide semiconductor capacitor material

References

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