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silicon-supported AlN/GaN/In0.176Al0.824N trilayer film

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium nitride

aluminum nitride
Type Single Compound
Formula AlN
Role layer
2

gallium nitride

Type Single Compound
Formula GaN
Role layer
3

In0.176Al0.824N

Type Single Compound
Formula In0.176Al0.824N
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • silicon
  • ammonia
Product

silicon-supported AlN/GaN/In0.176Al0.824N trilayer film

Thickness: 100 nm

Thickness: 1400 nm

Thickness: 150 nm

Medium: none

Support: silicon

References

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