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AlN/PZT/Pt/Ti/SiO2/Si multilayer structure

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

titanium

Type Single Compound
Formula Ti
Role layer
3

platinum

Type Single Compound
Formula Pt
Role layer
4

lead zirconate titanate

lead zirconium titanate PZT
Type Complex Compound
Formula
Role layer
5

AlN nanograins

Type Nano Material
Formula
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
relative permittivity

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Applications

Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. 5Dmamk6f3esGVDgXAQ7W
Product

AlN/PZT/Pt/Ti/SiO2/Si multilayer structure

Grain size: 47 nm

RMS roughness: 7.9 nm

Thickness: 50 nm

Thickness: 500 nm

Medium: none

Support: silicon

References

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