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HfO2 thin film

Based on

4 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role raw materials
2

aluminium

aluminum
Type Single Compound
Formula Al
Role dopant

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
adiabatic temperature change

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. JdZ1tn
Product

HfO2 thin film

Thickness: ~ 4.85 nm

Medium: none

Support: N-type gallium arsenide/gallium arsenide

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • hafnium(IV) oxide
  • cerium oxide
  1. EtEi3OBSAuOHJrWG
Product

HfO2 thin film

Thickness: ~ 20 nm

Medium/Support: none

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • hafnium(IV) oxide
  • cerium oxide
  1. Ge55iMo3BbOzzuI4
Product

HfO2 thin film

Thickness: ~ 20 nm

Medium/Support: none

Method 4

Type: Chemical synthesis
Source:
Starting materials
  1. Yki62f
Product

HfO2 thin film

Crystallite size: ~ 10.5 nm

Thickness: ~ 19.6 nm

Medium: none

Support: N-type gallium arsenide/gallium arsenide

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • hafnium tetrachloride
  • water
  • trimethyl aluminum
See all (4)
  1. TX8PDe
Product

HfO2 thin film

Thickness: 10 nm

Medium: none

Support: TiN on Si substrate

References

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