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HfO2 layer

Based on

18 Articles
2016 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role raw materials

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • hafnium(IV) isopropoxide
  1. WVEVmNQx0hLfFnMEbDfxwe8rzgAqsVly
  2. yb3pITkVLuaQwtM9EXVxerLf
Product

HfO2 layer

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • tetrakis(dimethylamido)-hafnium(IV)
  • water
Product

HfO2 layer

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • B-doped p-type Si
  1. EDrdXH1Si
Product

HfO2 layer

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • water
  • silicon-germanium
  1. mqWGmqbddKmjrCN
  2. D6EnnWt3O7RcLyslW2b70CSS8
Product

HfO2 layer

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • B-doped p-type Si
  1. CVEw29HLi
Product

HfO2 layer

References

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