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HfO2 layer

Based on

19 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role raw materials

Properties

General physical and chemical properties

Property Value Source
capacitance dependent on hysteresis

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Applications

Area Application Source
electronics

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Characterization

Method Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • hafnium(IV) isopropoxide
  1. yvo62NyFTQPhoOHiYT0BUnMRK0kP9SEj
  2. dEcaJpKHemPgNZuNlbKpVzob
Product

HfO2 layer

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • B-doped p-type Si
  1. cMfDdlYDn
Product

HfO2 layer

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • ethyl(methyl){tris[ethyl(methyl)amino]hafnio}amine
  • water
  • silicon germanium
  1. CNK2lOJfkBz5igB
  2. uvayDSYG2NtEVMSi2syGIjh0w
Product

HfO2 layer

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • hafnium tetrachloride
  • water
  1. DmvF4CYJob9
  2. K8ShugP
Product

HfO2 layer

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • B-doped p-type Si
  1. CeuOiyaQD
Product

HfO2 layer

References

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