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Si3N4/SRSN/SiO2 film

Based on

1 Articles
2011 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer
3

silicon nitride

Type Single Compound
Formula Si3N4
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
photoluminescence dependent on annealing temperature

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Applications

Characterization

Method Nanomaterial Variant Source
photoluminescence

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-Si
  • oxygen
Product

Si3N4/SRSN/SiO2 film

Thickness: ~ 10 nm

Thickness: ~ 50 nm

Medium/Support: none

References

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