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SiOxNy layer on Si

Based on

2 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role raw materials
2

atomic nitrogen

nitrogen atom
Type Single Compound
Formula N
Role dopant

Properties

General physical and chemical properties

Property Value Source
relative permittivity

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Applications

Characterization

Method Source
infrared spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
  • nitrogen
Product

SiOxNy layer on Si

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
  • nitrogen
Product

SiOxNy layer on Si

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
  • nitrogen
Product

SiOxNy layer on Si

References

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