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AlOx layer

Based on

8 Articles
2015 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

substoichiometric aluminum oxide

noncrystalline aluminum oxide anodized aluminum oxide oxidized aluminium aluminium suboxide aluminium oxide aluminum oxide alumina
Type Single Compound
Formula AlO(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Source
capacitance

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Applications

Area Application Source
data storage

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Characterization

Method Source
energy dispersive X-ray spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • p-type Si
  • oxygen
  1. QS6uSSBrSnH80IiisTKsrw3c
  2. RXIlgmqY7R2lYfXH9p0blafYSl5o
Product

AlOx layer

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • polyethylene naphthalate
  • water
  1. vI4pLzMW
Product

AlOx layer

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • n-type Si/SiO2
  • oxygen
  1. XMhTSCwLcHb1emL6Wwt24ory
  2. 8JW7nIXANFHQBLEYIsowAqKrVdqT
Product

AlOx layer

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
Product

AlOx layer

References

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