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Si-based nanopore membrane structure with dielectric silica layer on expose silicon

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

Type Single Compound
Formula Si3N4
Role layer
2

boron-doped silicon

B-doped silicon
Type Complex Compound
Formula
Role layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
4

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • boron-doped silicon
  • ammonia
  • dichlorosilane
Product

Si-based nanopore membrane structure with dielectric silica layer on expose silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • boron-doped silicon
  • ammonia
  • dichlorosilane
Product

Si-based nanopore membrane structure with dielectric silica layer on expose silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • boron-doped silicon
  • ammonia
  • dichlorosilane
Product

Si-based nanopore membrane structure with dielectric silica layer on expose silicon

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • boron-doped silicon
  • ammonia
  • dichlorosilane
Product

Si-based nanopore membrane structure with dielectric silica layer on expose silicon

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • boron-doped silicon
  • ammonia
  • dichlorosilane
Product

Si-based nanopore membrane structure with dielectric silica layer on expose silicon

References

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