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Pd-SiN film

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role raw materials
2

titanium

Type Single Compound
Formula Ti
Role layer
3

palladium

Type Single Compound
Formula Pd
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
conductance

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Applications

Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. n1Ps
Product

Pd-SiN film

Pore diameter: 3.0 nm

Thickness: 1 nm

Thickness: 30 nm

Thickness: 9 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. UaOw
Product

Pd-SiN film

Pore diameter: 4 nm

Thickness: 1 nm

Thickness: 18 nm

Thickness: 9 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. Pgf5
Product

Pd-SiN film

Pore diameter: 4.2 nm

Thickness: 1 nm

Thickness: 10 nm

Thickness: 9 nm

Medium/Support: none

References

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