Loading ...

Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

annealed Cu/Ta/Si stack

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum

Type Single Compound
Formula Ta
Role layer
2

copper silicide

Type Single Compound
Formula Cu3Si
Role layer
3

copper

Type Single Compound
Formula Cu
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
activation energy of copper atoms in tantalum layer

More information/entries available to subscribers only.

Or, view sample content

Applications

Characterization

Method Nanomaterial Variant Source
transmission electron microscopy

More information/entries available to subscribers only.

Or, view sample content

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. poVtTuBcL
  2. CIDYmxfGWxrav1kmx6b2kkLdz
  3. EGYRGr
  4. n9dIlP
Product

annealed Cu/Ta/Si stack

Thickness: ~ 20 nm

Thickness: ~ 400 nm

Medium: none

Support: silicon

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial