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TiAlN/SiNx nanocomposite film, 20 at% Si

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

a-SiNx c-SiNx
Type Single Compound
Formula SiN(x)
Role binder
2

Ti0.7Al0.3N

Type Single Compound
Formula Ti0.7Al0.3N
Role fillers

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
hardness

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Applications

Area Application Nanomaterial Variant Source
coatings

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Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. 9AIhNmTD
  2. 1hIHccMKQ4nW
  3. sSFidUX
  4. 0lLqjRn
  5. It4orlMFU7W4TwPkjaK04
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. yJbZWvQO
  2. Gg9iNOhPoONa
  3. 2nU1flR
  4. kjly1lj
  5. pG9KOAaSp2buOKyImGsK6
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. aZOigOmv
  2. zoZdxIOQvtPh
  3. 1aJZ4wa
  4. 0DDjVgI
  5. LpH06ap9YFAJHK5VCJXyZ
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. NqwivYOF
  2. paek6jHnNpdp
  3. rwzcgCE
  4. eGVj6Z7
  5. yaKHCj8VIh0rKkhzmEsNK
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • Ti0.7Al0.3
  • nitrogen
  1. 62VRTArr
  2. nl6YnH79bFyI
  3. Pn4LChK
  4. 6Niueu0
  5. YmrtLp1oYgE8CLBjPAFqA
Product

TiAlN/SiNx nanocomposite film, 20 at% Si

Crystallite size: ~ 11 - ~ 15 nm

Interfacial thickness: ~ 0.3 - ~ 0.5 nm

Thickness: ~ 2000 nm

Medium: none

Support: silicon

References

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