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Si based templates before thermal oxidation

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role raw materials
2

silicon nitride

Type Single Compound
Formula Si3N4
Role partial layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  • silicon nitride
Product

Si based templates before thermal oxidation

Hole depth: ~ 200 nm

Hole diameter: 200 nm

Medium/Support: none

References

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