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W:Al2O3 film on n-type Si(100)

Based on

1 Patents
2013 Most recent source

Composition

1

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role raw materials
2

tungsten

Type Single Compound
Formula W
Role raw materials
3

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role layer

Properties

General physical and chemical properties

Property Value Source
atomic concentration

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Applications

Characterization

Method Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • trimethylaluminium
  • n-type Si(100)
  • water
See all (4)
Product

W:Al2O3 film on n-type Si(100)

References

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