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TiN/SiNx-based nanocomposite film, 20 at% Si

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

Si-rich silicon nitride

silicon-rich nitride silicon nitride Si-rich nitride a-SiNx SRN
Type Single Compound
Formula SiN(x)
Role binder
2

titanium nitride

nc-TiN
Type Single Compound
Formula TiN
Role fillers

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
hardness

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Applications

Area Application Nanomaterial Variant Source
coatings

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Characterization

Method Nanomaterial Variant Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. f9pfChYt
  2. d8KPAoOCp7if
  3. jFnLe7f
  4. G0FJ076
  5. VRQDKgCEu5A2wQWBjxZPR
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Crystallite size: ~ 4 - ~ 8 nm

Interfacial thickness: ~ 2 nm

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. UK9fSgNh
  2. atnMwXYJrlsR
  3. xYtjnEq
  4. v9sjZ6Z
  5. fM4XyB9jCHMRThpbNVnQL
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. OhkskNwE
  2. qfPBTpL5DM8Z
  3. s1aBfFh
  4. SptM74P
  5. zJiffndmdJiPK5d0iyTEp
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. rSq94N6y
  2. IlrIeqcrzWwJ
  3. b5yeiLb
  4. AllRUrm
  5. 2baNXkbh7OxoCxTdkGpdQ
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Crystallite size: ~ 6 - ~ 10 nm

Interfacial thickness: ~ 0.5 - ~ 0.7 nm

Thickness: ~ 2000 nm

Medium: none

Support: silicon

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. RvbGlLqO
  2. mKu8IEYEyDnA
  3. MCi79Gv
  4. 2d6K4Hj
  5. nwM8kGxV8vo9L68SUJ7Lj
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Thickness: ~ 2000 nm

Medium: none

Support: silicon

References

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