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TiN/SiNx-based nanocomposite film, 20 at% Si

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon nitride

a-SiNx c-SiNx
Type Single Compound
Formula SiN(x)
Role binder
2

titanium nitride

nc-TiN
Type Single Compound
Formula TiN
Role fillers

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. jhXnzzG7
  2. lBGdmocVEMi7
  3. BcpASoy
  4. fyUcl7Y
  5. Og2rdmj5G2GqBtzwFcKBY
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. QIIqxS31
  2. VyXcEvGNopwD
  3. GVwu3KZ
  4. 5Qe5gMu
  5. QyoKSUjBviE9cGiA3IkXg
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. lEWfvYJQ
  2. SHvCLtFItRix
  3. 5ADJPvM
  4. GSOA627
  5. B7HQlmpZ0f7vdFv8vmL57
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. mCj0aGGa
  2. 4DtBkY7vEHNL
  3. fBV9Txy
  4. FKiEt9N
  5. eL89YTxxDMhn2KMTGH80y
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • titanium
  • nitrogen
  1. X3NZ1Q5D
  2. yCttbAIePxPV
  3. QWP6SeU
  4. NsYr27t
  5. VxhyJmIqCsg20fzwA2rD1
Product

TiN/SiNx-based nanocomposite film, 20 at% Si

References

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