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negative-type resist film

Based on

1 Patents
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

negative-type resist film composition

Type Complex Compound
Formula
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
sensitivity

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Applications

Area Application Nanomaterial Variant Source
nanoprinting/nanolithography

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • negative-type resist film composition
  1. KyJHoZxeLdhr6XXlg8hjc7J396gXhB34WQ9dhBSDezqliTp
Product

negative-type resist film

RMS roughness: < 5 nm

Thickness: 100 nm

Medium/Support: none

References

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