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oxidized titanium nitride on silicon wafer

Based on

1 Patents
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

titanium nitride

Type Single Compound
Formula TiN
Role raw materials
2

oxygen

Type Single Compound
Formula O2
Role partial layer

Properties

Applications

Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. 8yA8lA
  2. Ph9U6F6
Product

oxidized titanium nitride on silicon wafer

References

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