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copper-embedded dielectric capped with conformal multilayer dielectric

Based on

1 Patents
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

copper-embedded dielectric

Type Nano Material
Formula
Role core
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type Single Compound
Formula SiN(x)
Role layer

Properties

Applications

Characterization

Method Nanomaterial Variant Source
scanning transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

copper-embedded dielectric capped with conformal multilayer dielectric

Thickness: 9.8 - 11.1 nm

Medium/Support: none

References

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