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TaOx layers

Based on

4 Articles
2014 Most recent source

Composition

1

oxygen deficient tantalum oxide

tantalum suboxide tantalum oxide TaO2-x TaOx TaOy TaOx
Type Single Compound
Formula TaO(x)
Role raw materials

Properties

General physical and chemical properties

Property Value Source
compressive stress

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Applications

Area Application Source
data storage

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Characterization

Method Source
optical microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • tantalum
  • oxygen
  1. i5g0PUrnq3j5271p0
  2. DmBAIn
Product

TaOx layers

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • tantalum
  • water
Product

TaOx layers

References

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