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nanofilm

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum(III) nitride

tantalum nitride
Type Single Compound
Formula TaN
Role layer
2

tantalum

Type Single Compound
Formula Ta
Role layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
resistivity dependent on surface roughness of TaN layer

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Applications

Characterization

Method Nanomaterial Variant Source
X-ray diffraction

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon dioxide
  • tantalum(III) nitride
Product

nanofilm

Roughness: 0.5 - 2.3 nm

Thickness: ~ 14 nm

Thickness: ~ 20 nm

Medium: none

Support: silicon dioxide

References

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