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HfO2 film

Based on

23 Articles
2017 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role raw materials

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • molybdenum(IV) sulfide
Product

HfO2 film

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • tetrakis(dimethylamido)-hafnium(IV)
  • n-doped silicon
  • water
  1. 5NWh
Product

HfO2 film

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • molybdenum(IV) sulfide
Product

HfO2 film

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • tetrakis(dimethylamido)-hafnium(IV)
  • water
  1. bxW1dyh
  2. QVDgXCcdeiI
Product

HfO2 film

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • tetrakis(dimethylamido)-hafnium(IV)
  • n-doped silicon
  • water
  1. StFV2
Product

HfO2 film

References

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