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tantalum inverse square-patterned film on silicon

Based on

2 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

tantalum

Type Single Compound
Formula Ta
Role raw materials

Properties

Applications

Characterization

Biological effects

Biological system Test details Source

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Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  1. WmLlfmDwKPe7Y0C0OrE8LvSpmwjWM3TfTbVrNH
  2. 1r4SLFxfF5vdjCU
Product

tantalum inverse square-patterned film on silicon

Method 2

Type: Physical formation
Source:
Starting materials
  • β-tantalum
  1. PY8PhWHf85GU52urDmJOpKWe
Product

tantalum inverse square-patterned film on silicon

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon
  1. THrGw37lIai9QSqMUPX1FMCv8hdZgvYwQzDpPl
  2. XAGF8r4ZGOTDlDP
Product

tantalum inverse square-patterned film on silicon

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon
  • tantalum
  1. 8koHwGPbHKaX
Product

tantalum inverse square-patterned film on silicon

References

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