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SiN membrane

Based on

27 Articles
5 Patents
2017 Most recent source

Composition

1

silicon-rich nitride

silicon mononitride silicon nitride
Type Single Compound
Formula SiN
Role raw materials

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
(3,3) mechanical mode quality factor

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Sensor properties

Type of sensor Sensor property Nanomaterial Variant Source
compounds sensor for dsDNA

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Applications

Area Application Nanomaterial Variant Source
diagnostics

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Characterization

Method Nanomaterial Variant Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. aG5
  2. UHNW2Cdp07iIdI
  3. t4AL3i
  4. xQHW7FNfwjDFf3
Product

SiN membrane

Pore diameter: 12.5 nm

Thickness: 20 nm

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. tKD
  2. N8bBvUOLbeD5cz
  3. wStyrO
  4. 2hRTfH8zFhezuR
Product

SiN membrane

Pore diameter: 18.0 nm

Thickness: 20 nm

Medium/Support: none

Method 3

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. lPZ
  2. bnjMsSub5Wu4QH
  3. vDL3fU
  4. WgvUYew1WFxAOZ
Product

SiN membrane

Pore diameter: 28.0 nm

Thickness: 20 nm

Medium/Support: none

Method 4

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. Q9V
  2. mkcJrPkTFp8pzd
  3. 0IjJpP
  4. O0AHPlNgES9lwy
Product

SiN membrane

Pore diameter: 4.7 nm

Thickness: 20 nm

Medium/Support: none

Method 5

Type: Physical formation
Source:
Starting materials
  • silicon-rich nitride
  1. 8sO
  2. KMliwjAFnq7O2V
  3. SW04ii
  4. AA0k7uGPYtBaNj
Product

SiN membrane

Pore diameter: 5.8 nm

Thickness: 20 nm

Medium/Support: none

References

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