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aluminium nitride/silica/tantalum(V) oxide film

Based on

1 Patents
2012 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

aluminium nitride

aluminum nitride AlN
Type Single Compound
Formula AlN
Role layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer
3

tantalum pentoxide

tantalum(V) oxide tantalum oxide
Type Single Compound
Formula Ta2O5
Role layer
4

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role layer

Properties

Applications

Area Application Source
lasers

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Characterization

Biological effects

Preparation

References

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