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polyimide/ITO/TiN/Hf0.5Zr0.5O2/TiN/ITO capacitor

Based on

1 Articles
2017 Most recent source

Composition

1

polyimide

Type Polymer
Formula
Role substrate
2

tin-doped indium oxide

indium tin oxide ITO
Type Complex Compound
Formula
Role transparent electrodes
3

titanium nitride

Type
Formula TiN
Role
4

hafnium zirconium oxide film

Hf0.5Zr0.5O2 film
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
maximum remnant polarization

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Applications

Area Application Nanomaterial Variant Source
data storage

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Characterization

Method Nanomaterial Variant Source
grazing incidence X-ray and neutron diffraction

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • tin-doped indium oxide
  • polyimide
  • titanium nitride
  1. 9cUT0sp
  2. q8hjL2X
  3. KaFcS
Product

polyimide/ITO/TiN/Hf0.5Zr0.5O2/TiN/ITO capacitor

Size: not specified

Medium/Support: none

References

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