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Hf/HfO2/Pt RRAM

Based on

1 Articles
2017 Most recent source

Composition

1

Si wafer

Type Complex Compound
Formula
Role substrate
2

titanium

Type Single Compound
Formula Ti
Role adhesion layer
3

platinum

Type Single Compound
Formula Pt
Role bottom electrode
4

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role switching layer
5

hafnium

Type Single Compound
Formula Hf
Role electrodes

Properties

General physical and chemical properties

Property Value Source
electric current dependent on resistive switching structure in array

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Applications

Area Application Source
data storage

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si wafer
  • titanium
Product

Hf/HfO2/Pt RRAM

References

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