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In2O3 field-effect transistor-based pH sensor

Based on

1 Articles
2017 Most recent source

Composition

1

p-Si

Type Complex Compound
Formula
Role back gate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
3

amine-terminated In2O3 thin film

Type Nano Material
Formula
Role channels
4

titanium

Type Single Compound
Formula Ti
Role adhesion layer
5

gold

Type Single Compound
Formula Au
Role source
6

gold

Type Single Compound
Formula Au
Role drain
7

1-dodecanethiol

dodecanethiol
Type
Formula C12H26S
Role
8

poly(dimethylsiloxane)

polydimethylsiloxane PDMS
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source
threshold voltage

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Sensor properties

Type of sensor Sensor property Source
pH sensor

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2 substrate
  • indium(III) nitrate hydrate
  1. HmPK7
Product

In2O3 field-effect transistor-based pH sensor

References

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