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metal-oxide-semiconductor field-effect-transistor

Based on

1 Articles
2017 Most recent source

Composition

1

titanium nitride

Type Single Compound
Formula TiN
Role electrodes
2

HfAlyOx

Type
Formula
Role
3

oxygen deficient tantalum oxide

tantalum suboxide tantalum oxide TaO2-x TaOx TaOy TaOx
Type Single Compound
Formula TaO(x)
Role capping layer
4

titanium nitride

Type Single Compound
Formula TiN
Role electrodes
5

aluminium

aluminum
Type Single Compound
Formula Al
Role electrodes

Properties

General physical and chemical properties

Property Value Source
conductance

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Applications

Area Application Source
data storage

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Characterization

Method Source
transmission electron microscopy

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Biological effects

Preparation

References

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