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TiN/HfO2/Ta/TaN device

Based on

1 Articles
2017 Most recent source

Composition

1

tantalum(III) nitride

tantalum nitride
Type Single Compound
Formula TaN
Role bottom contact electrode
2

tantalum

Type
Formula Ta
Role
3

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role switching layer
4

titanium nitride

Type Single Compound
Formula TiN
Role top contact electrode

Properties

General physical and chemical properties

Property Value Source
conductance dependent on high resistance state value

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Applications

Area Application Source
data storage

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Characterization

Biological effects

Preparation

References

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