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multilayer epoxy-copper-ITO electrodes-based force sensor array

Based on

1 Articles
2017 Most recent source

Composition

1

polyamic acid

Type Polymer
Formula
Role substrate
2

SU8 2000.5 epoxy resin

Type
Formula
Role
3

patterned doped Si nanomembrane

patterned doped SiNM
Type Complex Compound
Formula
Role PIN diode
4

silicon

Type Single Compound
Formula Si
Role strain gauge
5

copper-indium tin oxide multilayer

Cu-ITO multilayer CI multilayer
Type Nano Material
Formula
Role electrodes
6

SU8 2000.5 epoxy resin

Type
Formula
Role

Properties

Sensor properties

Type of sensor Sensor property Source
pressure sensor

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • polyamic acid
  1. RzG4Qu0wFoKQ8jnE7RJlY7ygHqPvP9X
Product

multilayer epoxy-copper-ITO electrodes-based force sensor array

References

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