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TiN/HfO2/TiN capacitor

Based on

1 Articles
2016 Most recent source

Composition

1

p-doped silicon

p-doped Si
Type Complex Compound
Formula
Role substrate
2

titanium nitride

Type Single Compound
Formula TiN
Role electrodes
3

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role dielectric layer
4

titanium

Type Single Compound
Formula Ti
Role adhesion layer
5

platinum

Type Single Compound
Formula Pt
Role contacts

Properties

General physical and chemical properties

Property Value Source
voltage across dielectric

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

References

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