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HfOx/Al2O3-based RS device

Based on

1 Articles
2016 Most recent source

Composition

1

SiO2/Si

Type Complex Compound
Formula
Role substrate
2

titanium

Type Single Compound
Formula Ti
Role adhesion layer
3

platinum

Type Single Compound
Formula Pt
Role electrodes
4

hafnium sub-oxide

hafnium suboxide hafnium oxide hafnia HfOx
Type Single Compound
Formula HfO(x)
Role switch
5

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role switch
6

titanium nitride

Type Single Compound
Formula TiN
Role electrodes
7

aluminium

aluminum
Type
Formula Al
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

References

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