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FET-based In2O3 nanoribbon biosensor

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role gate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
3

In2O3 nanoribbon

In2O3 thin film
Type Nano Material
Formula
Role channel layer
4

titanium/gold film

Type Nano Material
Formula
Role source
5

titanium/gold film

Type Nano Material
Formula
Role drain

Properties

General physical and chemical properties

Property Value Source
drain current

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Sensor properties

Type of sensor Sensor property Source
pH sensor

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Applications

Area Application Source
electronics

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Characterization

Method Source
atomic force microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon/silica
  1. N5pG7M4
Product

FET-based In2O3 nanoribbon biosensor

References

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