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plasmonic-nanoelectromechanical system device

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

titanium

Type Single Compound
Formula Ti
Role adhesion layer
3

gold

Type
Formula Au
Role
4

gold prism

Au prism
Type Nano Material
Formula
Role plasmonic resonator
5

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type
Formula SiN(x)
Role

Properties

General physical and chemical properties

Property Value Source
cantilever mechanical frequency

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Applications

Area Application Source
photonics

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Characterization

Method Source
atomic force microscopy

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Biological effects

Preparation

References

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