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indium-gallium-zinc-oxide thin film transistor

Based on

1 Articles
2016 Most recent source

Composition

1

soda-lime-silica glass

soda-lime glass glass
Type Complex Compound
Formula
Role substrate
2

molybdenum

Type Single Compound
Formula Mo
Role gate
3

SiNx/SiOx

Type Complex Compound
Formula
Role gate dielectrics
4

IGZO

Type Complex Compound
Formula
Role semiconductor layer
5

silicon-rich silicon oxide

SRSO SiOx
Type Single Compound
Formula SiO(x)
Role dielectric layer
6

SiNx/SiOx

Type Complex Compound
Formula
Role dielectric layer
7

molybdenum

Type Single Compound
Formula Mo
Role source
8

molybdenum

Type Single Compound
Formula Mo
Role drain

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

References

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