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SiNW-FET array

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

boron-doped silicon nanowires

p-doped silicon NW p-doped Si NW p-doped SiNW
Type Nano Material
Formula
Role channels
4

titanium/palladium/titanium film

Type Nano Material
Formula
Role source
5

titanium/palladium/titanium film

Type Nano Material
Formula
Role drain
6

Si3N4 film

Type Nano Material
Formula
Role insulators
7

10 nm thick alumina layer

10 nm thick Al2O3 layer aluminium oxide film flat Al2O3 substrate alumina nanofilm alumina film Al2O3 layer Al2O3 film
Type Nano Material
Formula
Role insulators

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. ub4FqIi
Product

SiNW-FET array

References

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