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optomechanical torque sensor

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role optical microdisk
2

silicon

Type Single Compound
Formula Si
Role torsion mode
3

silicon

Type Single Compound
Formula Si
Role torsion rod
4

silicon

Type Single Compound
Formula Si
Role landing pad

Properties

Sensor properties

Type of sensor Sensor property Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-on-insulator
  1. 7WwU0ulNX0FBZX0ImKU8svdo9
  2. Qe753SYmidpQRm
Product

optomechanical torque sensor

References

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