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optomechanical torque sensor

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role optical microdisk
2

silicon

Type Single Compound
Formula Si
Role torsion mode
3

silicon

Type Single Compound
Formula Si
Role torsion rod
4

mesoscopic aluminum disk on silicon pad

Type Nano Material
Formula
Role landing pad

Properties

Applications

Area Application Nanomaterial Variant Source
sensors (excluding biosensors)

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-on-insulator
  1. L2OX5UkvFTyYzXquRbpU6M5fM
  2. qBadcVh8mN0uXq
Product

optomechanical torque sensor

Size: not specified

Medium/Support: none

References

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