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optomechanical torque sensor

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role optical microdisk
2

silicon

Type Single Compound
Formula Si
Role torsion mode
3

silicon

Type Single Compound
Formula Si
Role torsion rod
4

mesoscopic aluminum disk on silicon pad

Type Nano Material
Formula
Role landing pad

Properties

Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon-on-insulator
  1. Z6SERQ7sPsmf7Xf29h0ckQLoU
  2. zvcGmEM36RZ9p1
Product

optomechanical torque sensor

References

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