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Pt-capped TiN/Hf0.2Zr0.8O2/TiN capacitor on SiO2/Si substrate

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role substrate
3

titanium nitride

Type
Formula TiN
Role
4

hafnium zirconium oxide

Type
Formula Hf0.2Zr0.8O2
Role
5

titanium nitride

Type Single Compound
Formula TiN
Role electrodes
6

platinum

Type Single Compound
Formula Pt
Role electrodes

Properties

Applications

Area Application Source
electronics

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Characterization

Method Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
Product

Pt-capped TiN/Hf0.2Zr0.8O2/TiN capacitor on SiO2/Si substrate

References

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