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resonator

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role substrate
3

layered Ti/Au/carbon film

Type Nano Material
Formula
Role rear electrode
4

SU-8 2015 photoresist

Type
Formula
Role
5

gold

Type Single Compound
Formula Au
Role top electrode

Properties

Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2
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Product

resonator

References

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