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indium-gallium-zinc-oxide transistor

Based on

1 Articles
2015 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type
Formula SiN(x)
Role
3

silicon-rich silicon oxide

SRSO SiOx
Type Single Compound
Formula SiO(x)
Role gate dielectrics
4

indium gallium zinc oxide film

IGZO film
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon/silicon nitride/silicon-rich silicon oxide
  1. qhRhF6
Product

indium-gallium-zinc-oxide transistor

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon/silicon nitride/silicon-rich silicon oxide
  1. P6beRX
Product

indium-gallium-zinc-oxide transistor

References

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