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carbon nanotube-based mechanical resonator

Based on

1 Articles
2014 Most recent source

Composition

1

Si3N4/SiO2/Si

Type Complex Compound
Formula
Role substrate
2

tungsten

Type Single Compound
Formula W
Role adhesion layer
3

platinum

Type Single Compound
Formula Pt
Role gate
4

platinum

Type Single Compound
Formula Pt
Role source
5

platinum

Type Single Compound
Formula Pt
Role drain
6

carbon nanotubes

carbon nanotube CNT
Type Nano Material
Formula
Role resonator

Properties

General physical and chemical properties

Property Value Source
adsorbed inert gas coverage dependent on annealing pretreatment

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Applications

Area Application Source
electromechanical switching

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Characterization

Biological effects

Preparation

References

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